MPO 100 - Multi-User Tool for 3D Lithography and 3D

mpo 100MPO adalah aplikasisistem on Kegiatan Ditjen PSP; MPO versi 4.0 dikembangkan dengan mengakomodasi ide-ide yang diinisiasi oleh BPK; Database MPO versi„1 – 10 – 100 – 1000 – Achievable component hehts of over 1 cm, surfaces with roughness in the order of 10 nm, structure sizes of less than 100 nm, and writing speeds over 1000 mms: At the SPIE Photonics West in